WebTXRF310Fab. 全反射蛍光X線方式を採用し、ウェーハ表面上の汚染を非破壊・非接触で高感度に分析する装置です。. 300mm、200mmウェーハに対応し、軽元素Naから重元素Uまでの汚染元素を極微量で分析できます。. ウェーハからの回折X線の妨害を除くステージ駆動 … WebTXRF310Fab WAFER SURFACE CONTAMINATION METROLOGY BY TXRF Measurement of trace elemental surface contamination Features For semiconductor processes, a quick contamination inspection is required. Accepts wafers with dimensions of 300 mm, 200 mm, and 150 mm.Analytical elements in a wide range (NaU). Sensitivity to light elements (for …

Trace Elemental XRF Analyser - Rigaku TXRF310Fab - QES

WebSince its inception in 1951, Rigaku has been at the forefront of analytical and industrial instrumentation technology. Today, with hundreds of major innovations to their credit, the … WebThe TXRF 310Fab can measure elements from Na through U with a single-target, 3-beam X-ray system and a liquid nitrogen-free detector system. The TXRF 310Fab includes Rigaku's patented XYθ sample stage system, an in-vacuum wafer robotic transfer system, and new user-friendly windows software. These contribute to higher throughput, accuracy and ... hints for homebuilders

TXRF310Fab Rigaku

WebTXRF analysis can gauge contamination in all fab processes, including cleaning, litho, etch, ashing, films, etc. The TXRF 310Fab can measure elements from Na through U with a single-target, 3-beam X-ray system and a liquid nitrogen-free detector system. The TXRF 310Fab includes Rigaku’s patented XYθ sample stage system, an in-vacuum wafer ... WebSince its inception in 1951, Rigaku has been at the forefront of analytical and industrial instrumentation technology. Today, with hundreds of major innovations to their credit, the … WebTXRF analysis can gauge contamination in all fab processes, including cleaning, litho, etch, ashing, films, etc. The TXRF 310Fab can measure elements from Na through U with a single-target, 3-beam X-ray system and a liquid nitrogen-free detector system. The TXRF 310Fab includes Rigaku’s patented XYθ sample stage system, an in-vacuum wafer ... home remedies for cold sores ear wax